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Leti ordered new kobus solution to pursue long-term partnership on advanced CVD

Montbonnot, France, 20th of September 2017 ̶ KOBUS, a leading equipment supplier in advanced deposition solutions, and Leti, a technology research institute of CEA Tech, are pursuing their long term partnership through the acquisition by Leti of the latest generation of F.A.S.T.® (Fast Atomic Sequential Technology) 200mm solution from KOBUS. It will be used to increase Leti’s process capability in the field of conformal advanced deposition 3D devices.


“The F.A.S.T.® tool offers the flexibility and performance that we need to conduct our various research projects in the More than Moore field, and its technology opens up new exploration areas for advanced materials deposition needed for conformal film applications”, said Fabrice Geiger, Head of the Silicon Technology Division at Leti.


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